Cleanroom and Microfabrication Facility Information Extraction Dataset

#Web information extraction #Structured output generation #Facility entity recognition #Extraction result evaluation #Cleanroom resource search #Microfabrication facility catalogs #Research facility management #Facility webpage parsing

3578
0.5GB
JSON
CATL
MOBIUSI INC

Updated:2026-11-03

AI Analysis & Value Prop

This dataset uses official websites and facility pages for cleanrooms and microfabrication platforms as input, capturing details such as facility names and types, cleanroom classifications, environmental conditions, services, user groups, equipment, and locations. Its structured fields include source evidence, supporting model training to identify facility information in webpage text and produce consistent outputs. It is suitable for cleanroom facility search, resource catalog development, and training or evaluating information extraction models.

Dataset Insights

Sample Examples

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Technical Specifications

Field	Type	Description
file_name	string	File name
location	object	The facility's institutional and geographic location, using only details available in the source.
facility_name	string	The official name of the cleanroom, facility, or platform.
platform_type	string	The type of facility or platform, such as a cleanroom, nanofabrication center, or microfabrication laboratory.
service_users	array	User groups or organizations served by the facility, such as academic researchers, companies, or students.
source_content	string	The original HTML content of the facility webpage used as the extraction input.
source_evidence	array	Brief quotations or close paraphrases from the webpage that support the extracted facility profile.
available_services	array	Services, processes, or capabilities offered to facility users.
available_equipment	array	Key equipment or tool types explicitly mentioned as available at the facility.
environmental_conditions	array	Environmental parameters and operating conditions reported for the facility, such as temperature, humidity, or pressure.
cleanroom_classifications	array	Cleanliness standards and classifications stated for the facility, including standard names and class levels when available.

Compliance Statement

Authorization Type	Proprietary - Commercial AI Training License (No Redistribution)
Commercial Use	Requires exclusive subscription or authorization contract (monthly or per-invocation charging)
Privacy and Anonymization	No PII, no real company names, simulated scenarios follow industry standards
Compliance System	Compliant with China's Data Security Law / EU GDPR / supports enterprise data access logs

Frequently Asked Questions

What facility information does the dataset contain?: It covers facility details from cleanroom and microfabrication platform webpages, including facility names and types, cleanroom classifications, environmental conditions, available services, user groups, equipment, and locations. Source evidence is included to support the extracted information.

Which model tasks is the dataset suitable for?: It can support webpage information extraction, facility entity recognition, and structured output generation. It can also be used to evaluate how well models identify and organize fields in cleanroom facility information.

How can I confirm the dataset specifications or obtain it?: Refer to the dataset product page or the authorized provider's delivery documentation for sample counts, file formats, field types, and update details. The defined fields include webpage input, structured facility attributes, and source evidence.

Can the dataset be used commercially or redistributed publicly?: Usage rights depend on the provider's license and the terms governing the original webpage content. Before commercial training, redistribution, or public release, verify the dataset license and any applicable permissions for the source material.

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Cite this Work

@dataset{Mobiusi2026,
  title={Cleanroom and Microfabrication Facility Information Extraction Dataset},
  author={MOBIUSI INC},
  year={2026},
  url={https://www.mobiusi.com/datasets/ac203af43bbbec7001545a8239f00e0c},
  urldate={2026-10-22},
  keywords={cleanroom dataset,microfabrication facility,facility information extraction,cleanroom classification recognition,research facility catalog,web structured data,environmental condition extraction,structured output SFT},
  version={1.0}
}

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